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VLSI TECHNOLOGY

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New York : McGraw - Hill Book company., 1983

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<ol><li>crystal growth and wafer preparation</li><li>epitaxy</li><li>dielectric and polysilicon film deposition</li><li>oxidation</li><li>diffusion</li><li>ion implantation</li><li>lithograpy</li><li>dry etching</li><li>metallization</li><li>process simulation</li><li>vlsi process integration</li><li>diagnostic techniques</li><li>assembly techniques and packaging</li><li>yield and realiability</li></ol>

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